van Amerongen, A.H. (author), Agocs, T. (author), van Brug, H. (author), Nieuwland, G. (author), Venema, L. (author), Hoogeveen, R.W.M. (author) We have developed the technology to manufacture an immersed grating in silicon for the Mid-infrared E-ELT Imager and Spectrograph, METIS. We show that we can meet the required diffraction-limited performance at a resolution of 100000 for the L and M spectral bands. Compared to a conventional grating, the immersed grating drastically reduces the...
conference paper 2012
