Calibration Method for Particulate Matter Low-Cost Sensors Used in Ambient Air Quality Monitoring and Research

3D Advance Metrology by means of 3D Atomic Force Microscopy

We developed a new 3D-AFM technique that enables imaging of high aspect ratio trenches. By measuring both lateral and vertical forces on a cantilever tip, a subharmonic mode based on the attractive tip-sample forces becomes feasible. This enables the measurement of true 3D information of samples without causing damage. This is especially...

Fine steering mirror

TNO’s FSM technology is based on a unique electromagnetic actuator. The key benefits of this technology for are: Large range; ±2˚ optical range (both axis) - High band width: Closed loop bandwidth > 1kHz - Highly compact; ø27x30mm with ø20mm mirror - Reliable; Redundant windings, no wear, Passed life-time testing.

Nano-precision multi-agent Maglev positioning platform

This project is aiming to realize miniature self-contained carriers that can independently perform positioning and scanning tasks on nano-scale. Such carriers can support agents for performing tasks such as inspection, deposition, repair, and cleaning. All at the nano-scale. The carriers can make large movements in X-and Y-direction and have a...

Electromagnetic deformable mirror for space applications

To increase the collecting power and to improve the angular imaging resolution, space telescopes are evolving towards larger primary mirrors. The aerial density of the telescope mirrors needs to be kept low, however, to be compatible with the launch requirements. A light-weight (primary) mirror will introduce additional optical aberrations to...

Towards a carbon-contamination-tolerant EUV power sensor

A reproducible measurement of in-band EUV power over time is essential in EUV lithography, e.g. for dose control, for monitoring the transmission of (parts of) the optical path and for detecting changes in EUV source performance. However, all currently available sensors suffer from sensitivity degradation over time due to photon-induced...

Towards a carbon-contamination-tolerant EUV power sensor

A reproducible measurement of in-band EUV power over time is essential in EUV lithography, e.g. for dose control, monitoring the transmission of (parts of) the optical path and detecting changes in EUV source performance. However, all currently available sensors suffer from sensitivity degradation over time due to photon-induced contamination...

Electromagnetic deformable mirror development at TNO

Over the last decade TNO has developed a deformable mirror concept using electromagnetic actuators with the main advantages of having very low non-linearity and hysteresis, low power consumption, and high inherent reliability of the actuators. TNO recently started a program to redesign the electromagnetic actuator to improve the actuator...

Towards a contamination-tolerant EUV power sensor

In EUV Lithography short-, mid- and long-term control over in-band EUV power is needed for high-yield IC production. Existing sensors can be unstable over time due to contamination and/or degradation. TNO goal: to conceive a stable EUV power sensor. Sensitive to in-band EUV, negligible degradation, insensitive to out-of-band EUV, insensitive to...

Urbmobi. A mobile measurement device for urban environmental monitoring

Within the Urbmobi research project, a novel mobile measurement device is developed for urban areas. It provides temporally and spatially distributed environmental data and fulfills the need for monitoring at various places without the costs for a large number of fixed measurement stations. Urbmobi integrates state-of-the-art sensors for...

An inductive power transfer through metal object

The principle of Inductive Power Transfer (IPT)is very old but it is rarely used for transferring power from source to load via a conductive medium. This is because normally the medium restricts the power transfer due to losses or the shielding effects. However, for low energy applications, an acceptable amount of power could be transferred from...

Capacitive pressure sensor in post-processing on LTCC substrates

A capacitive pressure sensor was realized by means of a post-processing step on a low temperature co-fired ceramics (LTCC) substrate. The new sensor fabrication technology allows for integration of the sensor with interface circuitry and possibly also wireless transmission circuits on LTCC substrates to realize a truly autonomous sensor unit. A...

Elektronisch sluitsysteem: Bijzondere combinatie van mechanica en elektronica

In juni komt het elektronisch sluitsysteem van Lips Sloten op de markt. Zes jaar van intensieve samenwerking tussen mechanische en elektronische ontwerpers gingen vooraf aan de komst van dit unieke identificatiemiddel met 'look and feel’ eigenschappen van een mechanisch slot. De sleutelherkenning is gebaseerd op een inductieve koppeling tussen...

Actieve geofoon voor seismisch onderzoek

Lusdetectoren voor snelheidsmeting

Zoals reeds eerder in Verkeerskunde (nr. 4/79 blz. 156 e.v.) werd beschreven, kan met behulp van twee achter elkaar liggende lussen in het wegdek de snelheid van passerende voertuigen worden bepaald. Hiertoe worden beide lussen aangesloten op een delector, die vaststelt wanneer een voertuig de lus passeert. De snelheid v wordt vervolgens...