Deep subsurface imaging with subsurface probe micro-scopy @ GHZ

This work details the initial simulation and experimental GHz SPM work carried out at TNO.

High-throughput scanning probe instruments for nanopatterning, alignment, and overlay metrology

As the pitch approaches the 10nm node, in order to meet current and future patterning challenges, high resolution techniques are required, complementary to extreme ultraviolet lithography (EUVL) for high volume manufacturing of nanodevices. These complementary techniques should have the following specifications: 1) High patterning resolution,...

Efficient and Stable Acoustical Coupling for GHz Subsurface Probe Microscopy

Many techniques are under development for the detection of subsurface defects or cracks. One such method is GHz subsurface probe microscopy (GHz SSPM). Here, modulated GHz elastic waves are transmitted through the bottom of a sample. The waves are scattered by buried features and detected using the probe of an atomic force microscope (AFM),...

In situ TEM observation of the Boudouard reaction: Multi-layered graphene formation from CO on cobalt nanoparticles at atmospheric pressure

Using a MEMS nanoreactor in combination with a specially designed in situ Transmission Electron Microscope (TEM) holder and gas supply system, we imaged the formation of multiple layers of graphene encapsulating a cobalt nanoparticle, at 1 bar CO:N2 (1:1) and 500 °C. The cobalt nanoparticle was imaged live in a TEM during the Boudouard reaction....

Characterizing electron beam induced damage in metrology and inspection of advance devices

In situ observation of self-assembled hydrocarbon Fischer-Tropsch products on a cobalt catalyst

Fischer-Tropsch synthesis is a heterogeneous catalytic reaction that creates approximately 2% of the world's fuel. It involves the synthesis of linear hydrocarbon molecules from a gaseous mixture of carbon monoxide and hydrogen at high pressures (from a few to tens of bars) and high temperatures (200-350 €...°C). To gain further insight into the...