Searched for: author%3A%22Matters-Kammerer%2C+M.K.%22
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Gao, H. (author), Ying, K. (author), Matters-Kammerer, M.K. (author), Harpe, P. (author), Wang, B. (author), Liu, B. (author), Serdijn, W.A. (author), Baltus, P.G.M. (author)
A 5-bit digital controlled switch-type passive phase shifter realised in a 40 nm digital CMOS technology without ultra-thick metals for the 60 GHz Industrial, Scientific and Medical (ISM) band is presented. A patterned shielding with electromagnetic bandgap structure and a stacked metals method to increase the on-chip inductor quality factor are...
article 2016
Matters-Kammerer, M.K. (author), Jinesh, K.B. (author), Rijks, T.G.S.M. (author), Roozeboom, F. (author), Klootwijk, J.H. (author)
A detailed electrical analysis of multiple layer trench capacitors fabricated in silicon with atomic-layer-deposited Al 2O 3 and TiN is presented. It is shown that in situ ozone annealing of the Al 2O 3 layers prior to the TiN electrode deposition significantly improves the electric properties of the devices such as the dielectric constant,...
article 2012