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Bekman, H.H.P.T. (author), Westland, Y. (author), Elstgeest, T.H. (author), Mechielsen, T.W. (author), Haye, M.J. (author), Emmelkamp, J. (author), Molkenboer, F.T. (author), Koster, N.B. (author), Lensen, H.A. (author)
MFIG is a metrology tool for detecting low levels of contamination (Volatile Organic Compounds (VOC) and Airborne Molecular Contamination (AMC)). MFIG consist of an ion source followed by an electrostatic lens for beam focus control. After the electrostatic lens mass separation is achieved with a static magnet field. Detection is done by a...
public lecture 2022