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van Es, M.H. (author), Tamer, S. (author), Bloem, E. (author), Fillinger, L. (author), van Zeijl, E. (author), Maturová, K. (author), van der Donck, J.C.J. (author), Willekers, R.W. (author), Chuang, C.B. (author), Maas, D.J. (author)Patterning photoresist with extreme control over dose and placement is the first crucial step in semiconductor manufacturing. However, how can the activation of modern complex resist components be accurately measured at sufficient spatial resolution? No exposed nanometre-scale resist pattern is sufficiently sturdy to unalteredly withstand...article 2023
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van Es, M.H. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Quesson, B.A.J. (author), Fillinger, L. (author), Neer, P.L.M.J. (author)While Atomic Force Microscopy is mostly used to investigate surface properties, people have almost since its invention sought to apply its high resolution capability to image also structures buried within samples. One of the earliest techniques for this was based on using ultrasound excitations to visualize local differences in effective tip...article 2020
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van Es, M.H. (author), Quesson, B.A.J. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Fillinger, L. (author), van Neer, P.L.M.J. (author)In order to extract ever more performance from semiconductor devices on the same device area, the semiconductor industry is moving towards device structures with increasingly complex material combinations and 3D geometries. To ensure cost effective fabrication of next generation devices, metrology solutions are needed that tackle the specific...conference paper 2020
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van Es, M.H. (author), Quesson, B.A.J. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Fillinger, L. (author), van Neer, P.L.M.J. (author)In order to extract ever more performance from semiconductor devices on the same device area, the semiconductor industry is moving towards device structures with increasingly complex material combinations and 3D geometries. To ensure cost effective fabrication of next generation devices, metrology solutions are needed that tackle the specific...conference paper 2020
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Piras, D. (author), Fillinger, L. (author), Rajadurai, S.R.S. (author), van Es, M.H. (author), van der Lans, M.J. (author)In order to make stiffness based subsurface AFM a quantitative imaging modality, the experimental subsurface measurement must be interpreted with a versatile forward (and inverse) model. We have developed a fully parametric finite element model framework for the quantification of critical dimensions relevant in semicon applications. After...other 2019
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- van Es, M.H. (author), Fillinger, L. (author), Sadeghian Marnani, H. (author) public lecture 2019
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van Es, M.H. (author), Fillinger, L. (author), Sadeghian Marnani, H. (author)Extracting quantitative information about dimensions and material properties of buried structures is continuing to be an important but difficult task in metrology. Examples of questions asking for this capability include critical dimension metrology of fins such as the profile (bottom width, top width, height) or the presence and extent of voids...conference paper 2019
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Fillinger, L. (author), Tamer, M.S. (author), van Es, M.H. (author), van der Lans, M.J. (author)The TNO Optomechatronics Department is developing various Scanning Probe Microscopy (SPM) techniques, including Sub-surface Atomic Force Microscopy (AFM), as a way to address challenges for nondestructive quality control of optically opaque samples. To support the research and technical developments and to extract quantitative data CD metrology...other 2019
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van Es, M.H. (author), Fillinger, L. (author), Tamer, M.S. (author), van der Lans, M.J. (author)Imaging of nanoscale structures buried in a covering material is an extremely challenging task, but is also considered extremely important. From fundamental research into living cells structures, to process control in semiconductor manufacturing, many fields would benefit from the capability to image nanoscale structures through arbitrary ...other 2019
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Fillinger, L. (author), Nijhof, M.J.J. (author), de Jong, C.A.F. (author)A decade ago, TNO developed RASP (Rapid Acoustic Signature Prediction), a numerical model for the prediction of the target strength of immersed underwater objects. The model is based on Kirchhoff diffraction theory. It is currently being improved to model refraction, angle dependent reflection and transmission (possibly through anisotropic...conference paper 2014
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Fillinger, L. (author), Mantouka, A. (author), de Jong, C.A.F. (author), Gloza, I. (author), Sanchez, A. (author), Moya, E. (author), Schael, S. (author), Lennartsson, T. (author), Petit, G. (author), Fardal, R. (author), Hasenpflug, H. (author), Beckers, A.L.D. (author)SIRAMIS is a project coordinated by the European Defence Agency standing for Signature Response Analysis on Multi Influence Sensors. As most of the international trade is carried out through marine routes, it is important to evaluate the vulnerability of the merchant vessel fleet to sea mines in order to be able to limit the potential exposure...conference paper 2014
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Fillinger, L. (author), Hunter, A.J. (author), Clarijs, M.C. (author)Since 2010, TNO has conducted a number of experiments on passive diver detection in Dutch waters. We have demonstrated detection, localization and tracking of divers wearing open circuit and closed circuit underwater breathing apparatus as well as boats. However, until now, we have not conducted any such experiments in warm waters. The...conference paper 2014
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Fillinger, L. (author), Hunter, A.J. (author), Zampolli, M. (author), Clarijs, M.C. (author)Divers, including closed circuit (rebreather) divers constitute a potential threat to waterside infrastructures. Active diver detection sonars are available commercially but present some shortcomings, particularly in highly reverberant environments. This has led to research on passive sonar for diver detection. Passive detection of open-circuit...conference paper 2013
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Hunter, A.J. (author), Fillinger, L. (author), Clarijs, M.C. (author)A boom is a line of floats that constitutes a physical barrier for providing abovewater stopping power. However, it does not provide any situation awareness. In order to overcome this shortcoming, an integrated “booms and sensors” solution using passive sonar was conceived and tested experimentally by suspending hydrophones under a boom. The...conference paper 2013
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Hunter, A.J. (author), Fillinger, L. (author), Zampolli, M. (author), Clarijs, M.C. (author)A PHD particle filter implementation has been detailed for the fusion of measurements from multiple passive sonar nodes. It has been demonstrated on simulated metadata and on experimental passive acoustic data of divers and small boats collected in an operational port environment. Fusion at the metadata level lowers the necessary data bandwidth,...conference paper 2012
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Hunter, A.J. (author), Fillinger, L. (author), Zampolli, M. (author), Clarijs, M.C. (author)Surveillance of waterside locations for protection against threats from small fast surface vessels and underwater intruders is a very relevant but challenging problem. For this reason, the Netherlands Organisation for Applied Scientific Research (TNO) is developing SOBEK – a family of passive sonar technologies for waterside surveillance. The...conference paper 2012
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Fillinger, L. (author), Hunter, A.J. (author), Zampolli, M. (author), Clarijs, M.C. (author)Divers constitute a potential threat to waterside infrastructures. Active diver detection sonars are available commercially but present some shortcomings, particularly in highly reverberant environments. This has led to research on passive sonar for diver detection. Passive detection of open-circuit UBA (underwater breathing apparatus) has been...article 2012
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Fillinger, L. (author), Hunter, A.J. (author), Zampolli, M. (author), Clarijs, M.C. (author), Verolme, J.L. (author)Divers and small vessels are increasingly recognized as a potential threat to high value assets. Harbour and waterside surveillance systems that are used to counter the threat of divers are usually based on active sonar, whose performance can be limited by reverberation in a harbour environment. Passive techniques are based on the detection of...conference paper 2011
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Fillinger, L. (author), Hunter, A.J. (author), Zampolli, M. (author), Clarijs, M.C. (author), Verolme, J.L. (author)Situation awareness is an important component of security that justifies the equipment of sites with monitoring systems. For shore/harbour security, these systems are mostly composed of camera and radar, to monitor the land and the water surface, and of active sonar(s) when the underwater situation is monitored. An alternate approach for...conference paper 2011
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Fillinger, L. (author), de Theije, P.A.M. (author), Zampolli, M. (author), Sutin, A. (author), Salloum, H. (author), Sedunov, N. (author), Sedunov, A. (author), TNO Defensie en Veiligheid (author)The international rules for the protection of harbors against threats and intruders typically apply to threats emanating from the land side. Protection against actions and threats from the water side is much less regulated, apart from some individual cases. Potential threats from the water side may consist of intruders including divers with and...conference paper 2010