Manufacturing and integration status of the UH2.2 Adaptive Secondary Mirror

A consortium of industrial and academic partners, coordinated by TNO, is working on the realization of a 620mm adaptive secondary mirror (ASM) for the University of Hawaii’s 2.2-meter telescope. The ASM consists of a 620mm-diameter slumped convex aspherical mirror shell, manipulated by 210 variable-reluctance actuators mounted on a light...

Preliminary design of the Adaptive Secondary Mirror for the European Solar Telescope

This paper describes the preliminary design of the Adaptive Secondary Mirror (ASM) for the European Solar Telescope (EST), as designed by TNO. This ASM will contain 1950 actuators over an optical aperture of Ø80cm. The mirror-shell of this ASM is concave with a radius of 2.156m and has a thickness of 2.5mm. To cope with the high optical heat...

Progress on the University of Hawaii 2.2-meter adaptive secondary mirror

We report on progress at the University of Hawaii on the integration and testing setups for the adaptive secondary mirror (ASM) for the University of Hawaii 2.2-meter telescope on Maunakea, Hawaii. We report on the development of the handling fixtures and alignment tools we will use along with progress on the optical metrology tools we will use...

Design and MAIT Status of the UH2.2 Adaptive Secondary Mirror

An adaptive secondary mirror (ASM) is currently being developed for the UH2.2 telescope, consisting of a slumped 620mm convex aspherical facesheet, manipulated by 210 variable-reluctance actuators and supported on a siliconaluminium alloy support structure. The total power dissipation of the actuators is expected to be under 3 Watts. The ASM...

High-throughput atomic force microscopes operating in parallel

Atomic force microscopy (AFM) is an essential nanoinstrument technique for several applications such as cell biology and nanoelectronics metrology and inspection. The need for statistically significant sample sizes means that data collection can be an extremely lengthy process in AFM. The use of a single AFM instrument is known for its very low...

Nanopositioning MEMS stage for high speed positioning of metamaterials lenses for use in high resolution optical imaging

High resolution and high throughput imaging are typically mutually exclusive. While there is a wide range of techniques to image features beyond the diffraction limit of light, they all have their own benefits and drawbacks, but they are often very slow compared to optical systems. As such, extending the performance of optical microscopes...

Automated cantilever exchange and optical alignment for high-throughput parallel Atomic Force Microscopy

In atomic force microscopy (AFM), the exchange and alignment of the AFM cantilever with respect to the optical beam and position-sensitive detector (PSD) are often performed manually. This process is tedious and time consuming, and sometimes damages the cantilever or tip. To increase the throughput of AFM in industrial applications, the ability...

High throughput, parallel scanning probe microscope for nanometrology and nanopatterning applications

Scanning Probe microscope (SPM) is an important nanoinstrument for several applications such as bioresearch, metrology, inspection and nanopatterning. Single SPM is associated with relatively slow rate of scanning and low throughput measurement, thus not being suitable for scanning large samples such as semiconductor wafers and photolithography...

Demonstration of Parallel Scanning Probe Microscope for high throughput metrology and inspection

With the device dimensions moving towards the 1X node and below, the semiconductor industry is rapidly approaching the point where existing metrology, inspection and review tools face huge challenges in terms of resolution, the ability to resolve 3D and the throughput. Due to the advantages of sub-nanometer resolution and the ability of true 3D...

A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points

One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of the mechanical scanning stage, especially in the vertical (z) direction. According to the design principles of “light and stiff” and “static determinacy,” the bandwidth of the mechanical scanner is limited by the first eigenfrequency of the AFM...

Controlled mirror motion system for resonant diplexers in ECRH applications

High-power resonant diplexers for millimetre waves have various promising applications in ECRH systems. The round-trip resonator length of a diplexer needs to be accurately tuned to match its prescribed functionality. For this purpose one of the mirrors in the FADIS MkIIa diplexer has been mounted on a motion system, in order to control the...

The European Space Agency's FlySafe project, looking at the bird strike problem from another perspective

The bird strike problem is a negative side effect of the aerial mobility of both aircraft and birds. A successful prevention strategy should therefore be based on knowledge of the mobility of both parties involved. While we know all the details of aircraft mobility, surprisingly little is known about the mobility of birds. Most bird strike...

IASI OGSE Spot Scan: Design and realization of an infrared test equipment for use in vacuum

This paper presents the development of the IASI Infrared Spot Scan test equipment, with a focus on the mechanical design. The IASI instrument, developed by Alcatel, is a spaceborne meteorological instrument, for observation of the Earth atmosphere in the infrared wavelength region. An infrared Optical Ground Support Equipment (OGSE), developed...