Infrared and Optical Emission Spectroscopy on Atmospheric-Pressure Plasma-Enhanced Spatial ALD of Al2O3

Microscale diagnostics of Atmospheric Pressure Plasma-Enhanced Spatial Atomic Layer Deposition

Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors

In this manuscript, the authors investigate the growth of indium zinc oxide, indium zinc oxide (InZnO, IZO) as a channel material for thin-film transistors. IZO is grown at atmospheric pressure and a high deposition rate using spatial atomic layer deposition (S-ALD). By varying the ratio of diethylzinc and trimethylindium vapor, the In/(In þ Zn)...

Large-area spatial atmospheric ALD: Al2O3 in a Gen-1 sheet-to-sheet prototype tool

InZnOgrown by atmospheric plasma-enhanced spatial atomic layer deposition for application in high-mobility TFT circuits

Atmospheric plasma-enhanced spatial-ALD of InZnOfor high-mobility channels in Thin Film Transistors

Atmospheric pressure plasma enhanced spatial ALD of ZrO2 for low-temperature, large-area applications

High permittivity (high-k) materials have received considerable attention as alternatives to SiO2 for CMOS and low-power flexible electronics applications. In this study, we have grown high-quality ZrO2 by using atmospheric-pressure plasma-enhanced spatial ALD (PE-sALD), which, compared to temporal ALD, offers higher effective deposition rates...

Plasma technology for spatial ALD of conductive layers

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO2 for Low-Temperature, Large-Area Applications

High permittivity (high-k) materials have received considerable attention as alternatives to SiO2 for CMOS and low-power flexible electronics applications. In this study, we have grown high-quality ZrO2 by using atmospheric-pressure plasma-enhanced spatial ALD (PE-sALD), which, compared to temporal ALD, offers higher effective deposition rates...

Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2

Non-thermal plasma sources are known to lower the operation temperatures and widen the process windows in thermal ALD of thin-film materials. In spatial ALD, novel plasma sources with exceptional dimensional and chemical stability are required to provide the flow geometries optimized for efficient transport and use of radicals (O, N, H, OH, NH,...

Developments in plasma enhanced spatial ALD for high throughput applications [3.04]

Atomic layer deposition by means of spatial separation of reactive gases is emerging as an industrial manufacturing technology. Integration of non-thermal plasma in spatial ALD machines will further expand the process window towards lower operation temperatures and specific materials requiring radicals (O, N, H, OH, NH etc.). Plasma sources with...

Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching

Conventional (3D) etching in silicon is often based on the ‘Bosch’ plasma etch with alternating half-cycles of a directional Sietch and a fluorocarbon polymer passivation. Also shallow feature etching is often based on cycled processing. Likewise, ALD is time-multiplexed, with the extra benefit of half-reactions being self-limiting, thus...

Treatment of Polymer Surfaces with Surface Dielectric Barrier Discharge Plasmas

Due to ongoing improvements in polymer-based materials, they are being used in an increasingly wider range of applications. In addition to special bulk physical properties, specific surface properties are often required in particular applications. However, common polymers very often do not possess the desired surface properties. Several...

Surface dielectric barrier discharge jet for skin disinfection

A consortium consisting of the research institute TNO, the medical -university and hospital St Radboud and two industrial enterprises is working on a non-thermal plasma treatment method for hand disinfection. The group is seeking for cooperation, in particular in the field of validation methods and potential -standardization for plasma based...

The influence of surface DBD plasma treatment on the adhesion of coatings to high-tech textiles

The surface of high-performance poly(ethylene terephthalate) (PET) fibers is difficult to wet and impossible to chemically bond to different matrices. Sizing applied on the fiber surface usually improves fiber wetting, but prevents good adhesion between a matrix and the fiber surface. The present study demonstrates that the plasma treatment...

Experimental study into plasma-assisted PM removal for diesel engines

Plasma-assisted PM removal is examined in a packed-bed plasma system. This study focuses on the effect of plasma power, space velocity and exhaust gas composition on PM filtration. Experiments are done on an engine dynamometer with a VW 1.2l TDI engine. During these experiments, the airflow is throttled so large smoke levels are realized. Then,...

Power source for inactivation of micro-organisms with partial high voltage discharge in a continuous process

An electrical discharge technology is investigated as non-thermal method for inactivation of microorganisms. Potential applications include treatment of drinking water (e.g. legionella) and liquid food pasteurization (e.g. fruit juices). A strong interest exists in mild food conservation processes without the loss of food quality that results...