Frequency Modulation Subsurface Ultrasonic Force Microscopy

Title

Frequency Modulation Subsurface Ultrasonic Force Microscopy

 Author

van Es, M.H.
Sadeghian Marnani, H.

Publication year

2019

 Abstract

Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on a change in the sensing cantilever’s resonance frequency to detect subsurface structures through their mechanical properties. It gains sensitivity both from exploiting the cantilevers large dynamical stiffness at high frequency and from using the sensitivity of the shifting contact resonance frequency.

 Subject

Amplitude Modulation SSURFM
Frequency Modulation SSURFM (FM-SSURFM)
ERP Early Research Program
ERP 3D Nanomanufacturing Instruments
High Tech Systems & Materials
Industrial Innovation

 To reference this document use:

http://resolver.tudelft.nl/uuid:7ddf1a41-17fa-49be-8e3b-8d2eaacc530c

 TNO identifier

873569

 Publisher

TNO, Delft

 Bibliographical note

Presented poster

 Document type

other
Files
PDF vanes-2019-frequency.pdf