Title
Direct and high-throughput fabrication of mie-resonant metasurfaces via single pulse laser interference
Author
Berzins, J.
Indrisiūnas, S.
van Erve, K.
Nagarajan, A.
Fasold, S.
Steinert, M.
Gerini, G.
Gecys, P.
Pertsch, T.
Bäumer, S.M.B.
Setzpfandt, F.
Publication year
2020
Subject
High Tech Systems & Materials
Industrial Innovation
Dielectric nanostructures
Silicon resonators
Metasurfaces
Lasre-matter interaction
Direct laser interference patterning
Multibeam interference
To reference this document use:
http://resolver.tudelft.nl/uuid:124f8d6a-0d2d-4fa0-9d84-b8fc673d7302
TNO identifier
877708
Publisher
American Chemical Society ACS
Source
ACS Nano, 14, 6138-6149
Document type
article