Title
Optically coherent nitrogen-vacancy centers in micrometer-thin etched diamond membranes
Author
Ruf, M.
IJspeert, M.
van Dam, S.
de Jong, N.
van den Berg, J.H.
Evers, G.
Hanson, R.
Publication year
2019
Abstract
Diamond membrane devices containing optically coherent nitrogen-vacancy (NV) centers are key to enable novel cryogenic experiments such as optical ground-state cooling of hybrid spin-mechanical systems and efficient entanglement distribution in quantum networks. Here, we report on the fabrication of a (3.4 ± 0.2) μm thin, smooth (surface roughness rq < 0.4 nm over an area of 20 μm by 30 μm) diamond membrane containing individually resolvable, narrow linewidth (< 100 MHz) NV centers. We fabricate this sample via a combination of high-energy electron irradiation, high-temperature annealing, and an optimized etching sequence found via a systematic study of the diamond surface evolution on the microscopic level in different etch chemistries. Although our particular device dimensions are optimized for cavity-enhanced entanglement generation between distant NV centers in open, tunable microcavities, our results have implications for a broad range of quantum experiments that require the combination of narrow optical transitions and micrometer-scale device geometry.
Subject
High Tech Systems & Materials
Industrial Innovation
Nitrogen-vacancy center
Diamond nanofabrication
Electron irradiation
Optical coherence
Quantum information science
To reference this document use:
http://resolver.tudelft.nl/uuid:0ec86ac7-9ebb-4f17-b65f-1d6891e69f0c
DOI
https://doi.org/10.1021/acs.nanolett.9b01316
TNO identifier
875058
Publisher
American Chemical Society ACS, Philadelpha, PA, US
ISSN
1530-6984
Source
Nano Letters, 19 (6), 3987-3992
Document type
article