Frequency Modulation Sub-surface Atomic Force Microscopy

Title

Frequency Modulation Sub-surface Atomic Force Microscopy

 Author

Keyvani Janbahan, A.
Tamer, M.S.
van Es, M.H.
van der Lans, M.J.

Publication year

2019

 Abstract

Elasticity based Sub- surface Atomic Force Microscopy is a promising metrology solution for CD measurements, defect characterization and alignment and overlay applications.

 Subject

Frequency
Frequency modulation
Microscopy
Sub-surface atomic force microscopy
ERP Early Research Program
ERP 3D Nanomanufacturing Instruments
High Tech Systems & Materials
Industrial Innovation

 To reference this document use:

http://resolver.tudelft.nl/uuid:fe79e9ef-58b5-4a81-aa6e-52885e564260

 TNO identifier

867662

 Publisher

TNO, Delft

 Source

SID Semicon Innovation Day, Science Centre Delft, 21 May 2019

 Bibliographical note

Presented poster

 Document type

other
Files
PDF keyvani-2019-frequency.pdf