Print Email Facebook Twitter Feasibility of Top Actuated Scattering Based Subsurface Scanning Probe Microscopy (SSPM) Title Feasibility of Top Actuated Scattering Based Subsurface Scanning Probe Microscopy (SSPM) Author van Neer, P.L.M.J. Quesson, B.A.J. van Es, M.H. Piras, D. van der Lans, M.J. Publication year 2019 Abstract GOAL: investigate feasibility of top actuated scattering based SSPM using simulations. Subject High Tech Systems & MaterialsIndustrial InnovationTop actuated scatteringFeasibilityMicroscopySubsurface Scanning Probe Microsopy (SSPM)ERP Early Research ProgramERP 3D Nanomanufacturing Instruments To reference this document use: http://resolver.tudelft.nl/uuid:f753bc92-30cc-4cc8-9239-33630e620f2b TNO identifier 867686 Publisher TNO, Delft Source SID Semicon Innovation Day, Science Centre Delft, 21 May 2019 Bibliographical note Presented poster Document type other Files To receive the publication files, please send an e-mail request to TNO Library.