Fast rotating liquid metal layer as anode for high brightness X-ray source
The new generation compact X-ray source for semiconductor metrology requires a brilliance that is higher than existing technology can offer. In this report, we propose a new X-ray source where an electron beam is focused on a rotating liquid metal anode. We assume that high brilliance emission can be achieved with power densities up to 10 MW/mm2 in the focal spot. The liquid tin layer is formed on top of the rotating anode disk electrode which is partially immersed in liquid tin. This scheme of using liquid metal has recently been implemented in the bright 13.5 nm Extreme UV source of the EBL-2 beamline system at TNO. The existing liquid tin circulation system can provide cooling up to 10 kW of input power with peak densities up to 5 MW/mm2. A similar approach is discussed for a new X-ray source. In this report, we analyze an opportunity to focus a high-power e-beam of 70 keV on the fast-rotating liquid metal anode. A stable layer with the thickness of several tens of micrometers is considered as sufficient to generate X-rays.
Nuclear and plasma sciences
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High Tech Systems & Materials
29th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, virtual from Padova, Italy, 26-30 September 2020