Print Email Facebook Twitter Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL Title Optical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL Author Karppinen, M. Salminen, N. Korhonen, T. Alajoki, T. Petäjä, J. Bosman, E. van Steenberge, G. Justice, J. Khan, U. Corbett, B. Boersma, A. Contributor Chen, R.T. (editor) Schroder, H. (editor) Publication year 2015 Abstract Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UVcurable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed. Cop. 2015 SPIE. Subject Nano TechnologyMAS - Materials SolutionsTS - Technical SciencesIndustry ElectronicsIndustrial InnovationIntegrated opticsOptical couplingOptical interconnectPolymer photonicsSingle-mode waveguideUV nano-imprinting To reference this document use: http://resolver.tudelft.nl/uuid:edb49c00-f2e6-4582-9361-147b46afe0b1 DOI https://doi.org/10.1117/12.2082935 TNO identifier 526105 Publisher SPIE ISBN 9781628414585 ISSN 0277-786X Source Optical Interconnects XV; San Francisco; United States; 9 February 2015 through 11 February 2015, 9368 Series Proceedings of SPIE - The International Society for Optical Engineering Article number 93680H Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.