Title
Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)]
Author
Parsons, G.N.
Elam, J.W.
George, S.M.
Haukka, S.
Jeon, H.
Kessels, W.M.M.
Leskelä, M.
Poodt, P.
Ritala, M.
Rossnagel, S.M.
Publication year
2020
To reference this document use:
http://resolver.tudelft.nl/uuid:ec94bbdf-4c75-471f-bf68-ed0f42f5486d
DOI
https://doi.org/10.1116/6.0000143
TNO identifier
955304
Publisher
AVS Science and Technology Society
ISSN
0734-2101
Document type
article