Print Email Facebook Twitter Feasibility study of photo thermal acoustic imaging of buried nanowires in Gate-All-Around (GAA) nanowire FETs Title Feasibility study of photo thermal acoustic imaging of buried nanowires in Gate-All-Around (GAA) nanowire FETs Author van Neer, P.L.M.J. Piras, D. Koek, W. van Zwet, E. Marnani, H.S. Publication year 2017 Subject OM - Opto-Mechatronics AS - Acoustics & Sonar OPT - Optics2015 Nano Technology 2015 Observation, Weapon & Protection Systems 2015 Nano Technology To reference this document use: http://resolver.tudelft.nl/uuid:e93cf359-48c0-4ece-b0b6-1336b3d1f6c6 TNO identifier 782914 Publisher IEEE Computer Society ISBN 9781538633830 ISSN 1948-5719 Source 2017 IEEE International Ultrasonics Symposium, IUS 2017. 6 September 2017 through 9 September 2017 Article number 8092003 Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.