Title
Circuits and AMOLED display with self-aligned a-IGZO TFTs on polyimide foil
Author
Nag, M.
Bhoolokam, A.
Smout, S.
Willegems, M.
Muller, R.
Myny, K.
Schols, S.
Ameys, M.
Genoe, J.
Ke, T.H.
Vicca, P.
Ellis, T.
Cobb, B.
Kumar, A.
van der Steen, J.L.P.J.
Gelinck, G.
Fukui, Y.
Obata, K.
Groeseneken, G.
Heremans, P.
Steudel, S.
Publication year
2015
Abstract
A process to make self-aligned top-gate amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) on polyimide foil is presented. The source/drain (S/D) region's parasitic resistance reduced during the SiN interlayer deposition step. The sheet resistivity of S/D region after exposure to SiN interlayer deposition decreased to 1.5 kΩ/□. TFTs show field-effect mobility of 12.0 cm2/(V.s), sub-threshold slope of 0.5 V/decade, and current ratio (I ON/OFF) of >107. The threshold voltage shifts of the TFTs were 0.5 V in positive (+1.0 MV/cm) bias direction and 1.5 V in negative (-1.0 MV/cm) bias direction after extended stressing time of 104 s. We achieve a stage-delay of ~19.6 ns at V-DD = 20 V measured in a 41-stage ring oscillator. A top-emitting quarter-quarter-video-graphics-array active-matrix organic light-emitting diode display with 85 ppi (pixels per inch) resolution has been realized using only five lithographic mask steps. For operation at 6 V supply voltage (V-DD), the brightness of the display exceeds 150 cd/m2. A process to make self-aligned top-gate amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) is presented. TFTs show field-effect mobility of 12.0 cm2/(V.s), sub-threshold slope of 0.5 V/decade, and current ratio (I ON/OFF) of over 107. In applications, a 41-stage ring oscillator with a stage-delay of ~19.6 ns (at V-DD = 20 V) and a top-emitting quarter-quarter-video-graphics-array (QQVGA) active-matrix organic light-emitting diode (AMOLED) display with 85 ppi (pixels per inch) resolution using five lithographic mask steps have been realized on a polyimide foil. Copyright 2015 Society for Information Display.
Subject
Nano Technology
HOL - Holst
TS - Technical Sciences
Electronics
Industrial Innovation
A-IGZO
Display technology
Metal oxide
Polyimide foil
Self-aligned
TFT
To reference this document use:
http://resolver.tudelft.nl/uuid:e4c1b80b-0328-432d-ad8f-b860b3be1e0b
DOI
https://doi.org/10.1002/jsid.281
TNO identifier
525570
Publisher
Wiley-Blackwell Publishing Ltd
ISSN
1071-0922
Source
Journal of the Society for Information Display, 22 (10), 509-517
Document type
article