Title
Atmospheric plasma-enhanced spatial-ALD of InZnOfor high-mobility channels in Thin Film Transistors
Author
Illiberi, A.
Katsouras, I.
Gazibegovic, S.
Cobb, B.
Nekovic, E.
van Boekel, W.
Frijters, C.
Maas, J.
Roozeboom, F.
Creyghton, Y.
Poodt, P.
Gelinck, G.
Publication year
2017
Subject
Nano Technology
HOL - Holst
TS - Technical Sciences
Materials Physics
Industrial Innovation
Atomic layer deposition
Spatial ALD
Thin film transistors
IZO
Indium zinc oxides
To reference this document use:
http://resolver.tudelft.nl/uuid:e36f7a11-649d-4d33-b54a-46b98ac58f9a
TNO identifier
781611
Source
AVS 64th International Symposium & Exhibition 2017, Tampa, Florida (USA), Oct. 29 – Nov. 3, 2017. Abstract 4465 (Invited).
Document type
public lecture