Title
Helium ion beam induced growth of hammerhead AFM probes
Author
Nanda, G.
van Veldhoven, E.
Maas, D.J.
Sadeghian Marnani, H.
Alkemade, P.F.A.
Publication year
2015
Abstract
The authors report the direct-write growth of hammerhead atomic force microscope (AFM) probes by He+ beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+ beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of the beam results in the required three-dimensional (hammerhead) shape. The diameter of the needle depends on the ion beam dose, beam dwell time, and speed of the beam movement. A nanoneedle radius below 10 nm and a hammerhead smaller than 35 nm have been achieved. This fabrication process is robust and enables precise control over the three-dimensions of the hammerhead AFM probe. Finally, the authors test the capabilities of the fabricated AFM probes for two-dimensional metrology of sidewall angles and line-edge roughness of trenches and shark-fins in silicon.
Subject
Nano Technology
NI - Nano Instrumentation
TS - Technical Sciences
High Tech Systems & Materials
Physics
Industrial Innovation
Atomic force microscopy
Carbon
Ion beams
Ions
Nanoneedles
Beam-induced deposition
Fabrication process
Growth stages
Helium ion beams
Line Edge Roughness
Precise control
Sidewall angles
Three dimensions
Probes
To reference this document use:
http://resolver.tudelft.nl/uuid:da5ba1cc-4fbe-435c-9285-4ce708c1b919
TNO identifier
529832
Publisher
American Institute of Physics AIP
ISSN
2166-2746
Source
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 33 (6)
Article number
06F503
Document type
article