A Spatial ALD oxide passivation module in an all-spatial etch-passivation cluster concept

Title

A Spatial ALD oxide passivation module in an all-spatial etch-passivation cluster concept

Author

Roozeboom, F.
van den Bruele, F.
Creyghton, Y.L.M.
Poodt, P.W.G.
Kessels, W.M.M.

Publication year

2015

Subject

Nano Technology
TFT - Thin Film Technology
TS - Technical Sciences
Materials
Industrial Innovation
Atmospheric pressure
Atomic layer deposition
Oxide passivation

To reference this document use:

http://resolver.tudelft.nl/uuid:d1553462-af26-4dab-a60d-b51aedc89aaa

DOI

https://doi.org/10.1149/06907.0243ecst

TNO identifier

528483

Publisher

Electrochemical Society

Source

ECS Transactions, 69 (7), 243-258

Document type

article