Title
Characterization of the influence of strain on the optical properties of waveguides and microresonators in silicon-on-insulator technology
Author
Westerveld, W.J.
Harmsma, P.J.
Schmits, R.
Tabak, E.
Pozo Torres, J.M.
Urbach, H.P.
Yousefi, M.
Publication year
2011
Abstract
Silicon-on-insulator (SOI) technology has become one of the focus platforms for photonic integrated circuits (PICs). The CMOS technology opens the possibility for reliable mass fabrication of cost-effective photonic circuits. Recently there has been a growing interest in direct optical sensing of, for example, temperature, pressure or strain, using microring resonators [1,2]. Taillaert et. al. [3] proposed the use of a microring resonator as a strain gauge. Amemiya et. al. [4] reported on the effect of strain on SOI ring resonators. However, the strong lateral confinement of the light due to the high refractive index contrast in SOI waveguides and its corresponding modal dispersion was not taken into account. To the best of our knowledge, we are the first to present experimental results and understanding of the effects of an applied strain S in the effective index ne in a SOI-PIC. © 2011 IEEE.
Subject
Physics & Electronics
NI - Nano Instrumentation
TS - Technical Sciences
Physics
Applied strain
CMOS technology
Effect of strain
Effective index
High refractive index contrasts
Lateral confinement
Mass fabrication
Micro resonators
Microring resonator
Modal dispersion
Optical sensing
Photonic circuits
Photonic integrated circuits
Ring resonator
Silicon on insulator
Silicon-on-insulators
SOI waveguides
Strain gauge
CMOS integrated circuits
Electron optics
Gages
Optical resonators
Optics
Photonic integration technology
Quantum electronics
Refractive index
Waveguides
Silicon on insulator technology
To reference this document use:
http://resolver.tudelft.nl/uuid:ccf9b71a-eb1e-4221-81bb-3c35ddbec179
DOI
https://doi.org/10.1109/cleoe.2011.5943062
TNO identifier
435993
ISBN
9781457705335
Source
2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011, 22 May 2011 through 26 May 2011, Munich
Series
Proceedings of the Conference on Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011
Article number
5943062
Document type
conference paper