Assisted Diagnostics Methodology for Complex High-Tech Applications
van Wijk, R.J.
Controlling the operations and resolving product performance issues in today’s high-tech production systems, such as semiconductor fabs, becomes a cumbersome task, even for experienced field engineers. To address the pressing need for assisted diagnostics approaches, in this paper we propose a model-based step-wise methodology, based on domain-specific languages and Bayesian networks, to capture domain knowledge and allow automated and guided reasoning in complex end-to-end diagnostics flow. We illustrate the methodology components and show its applied strength in a real industrial setting of semiconductor production chains.
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Knowledge based diagnostics
Institute of Electrical and Electronics Engineers Inc.
2019 4th International Conference on System Reliability and Safety (ICSRS)
2019 4th International Conference on System Reliability and Safety (ICSRS), 20 - 22 November 2019, Rome, Italy