Print Email Facebook Twitter Foil-to-Foil system integration through capillary self-alignment directed by laser patterning Title Foil-to-Foil system integration through capillary self-alignment directed by laser patterning Author Arutinov, G. Mastrangeli, M. Smits, E.C.P. van Heck, G. den Toonder, J.M.J. Dietzel, A.H. Publication year 2014 Abstract This paper introduces a new integration technology for cost-effective high-precision mechanical and electrical integration of mesoscopic functional foil components onto foil substrates. The foil-to-foil assembly process is based on topological surface structuring via laser patterning that enables accurate capillaritydriven self-alignment of foil dies. The concurrent establishment of high-yield electrical interconnections is obtained through conductive adhesives. The foil surface energy controls the acceptance window of initial offsets for optimal self-alignment performance. The proposed topological patterning and system design enable alignment accuracies for centimeter-sized foil dies as high as 15 μm, barely influenced by the evaporation of the assembly liquid and curing of the conductive paste. Full foil-to-foil system integration is demonstrated through the electrically functional assembly of an array of Au-sputtered capacitive humidity sensors onto a patterned base foil circuitry. Subject Mechanics, Materials and StructuresHOL - HolstTS - Technical SciencesIndustry PhysicsIndustrial InnovationCapillarityFluidicsFoil-to-foil integration,Self-alignmentSelf-assembly To reference this document use: http://resolver.tudelft.nl/uuid:c5f5edc4-2ede-4247-aa85-c5b316a52b73 DOI https://doi.org/10.1109/jmems.2014.2321013 TNO identifier 520133 Publisher IEEE ISSN 1057-7157 Source Journal of microelectromechanical systems Document type article Files To receive the publication files, please send an e-mail request to TNO Library.