Print Email Facebook Twitter Microscale diagnostics of Atmospheric Pressure Plasma-Enhanced Spatial Atomic Layer Deposition Title Microscale diagnostics of Atmospheric Pressure Plasma-Enhanced Spatial Atomic Layer Deposition Author Mione, M.A. Creyghton, Y. Engeln, R. Kessels, W.M.M. Roozeboom, F. Publication year 2018 Subject 2015 Nano TechnologyTFT - Thin Film TechnologyTS - Technical SciencesMaterials PhysicsIndustrial InnovationAtomic layer depositionSpatial ALDPlasma enhancedPE-sALD To reference this document use: http://resolver.tudelft.nl/uuid:c083dc7e-152f-4ff9-a8d7-49b2c415bffc TNO identifier 783311 Bibliographical note Poster presented at Physics@Veldhoven, The Netherlands, January 23-24, 2018. Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.