High Resolution SubSurface Probe Microscopy for node5 applications
van Es, M.H.
van der Lans, M.J.
Imaging of nanoscale structures buried in a covering material is an extremely challenging task, but is also considered extremely important. From fundamental research into living cells structures, to process control in semiconductor manufacturing, many fields would benefit from the capability to image nanoscale structures through arbitrary (opaque) covering layers. We have shown that combining Atomic Force Microscopy with ultrasound in a technology called Scanning Subsurface Probe Microscopy (SSPM) is a promising technology to enable such imaging.
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High Resolution SubSurface Probe Microscopy
Imaging of nanoscale structures
Scanning Subsurface Probe Microsopy (SSPM)
ERP Early Research Program
ERP 3D Nanomanufacturing Instruments
High Tech Systems & Materials
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019