Title
High Resolution SubSurface Probe Microscopy for node5 applications
Author
van Es, M.H.
Fillinger, L.
Tamer, M.S.
van der Lans, M.J.
Publication year
2019
Abstract
Imaging of nanoscale structures buried in a covering material is an extremely challenging task, but is also considered extremely important. From fundamental research into living cells structures, to process control in semiconductor manufacturing, many fields would benefit from the capability to image nanoscale structures through arbitrary (opaque) covering layers. We have shown that combining Atomic Force Microscopy with ultrasound in a technology called Scanning Subsurface Probe Microscopy (SSPM) is a promising technology to enable such imaging.
Subject
Microscopy
Node5 applications
High Resolution SubSurface Probe Microscopy
Imaging of nanoscale structures
Nanoscale structures
Scanning Subsurface Probe Microsopy (SSPM)
ERP Early Research Program
ERP 3D Nanomanufacturing Instruments
High Tech Systems & Materials
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:c03343cb-a80d-4731-a050-4ae63c4eeee0
TNO identifier
867685
Publisher
TNO, Delft
Source
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Bibliographical note
Presented poster
Document type
other