Title
Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces
Author
Berzins, J.
Indrisiūnas, S.
Fasold, S.
Steinert, M.
Zukovskaja, O.
Cialla-May, D.
Gecys, P.
Bäumer, S.M.B.
Pertsch, T.
Setzpfandt, F.
Publication year
2020
Abstract
Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.
Subject
High Tech Systems & Materials
Industrial Innovation
Degrees of freedom (mechanics)
Magnetic resonance
Fabricated system
Focused laser beams
High precision positioning
Planar technology
Post-processing techniques
Resonant behavior
Selective heating
Specific absorption
Laser beam effects
To reference this document use:
http://resolver.tudelft.nl/uuid:bfa636cf-16f3-4433-9ddb-02322302b07e
DOI
https://doi.org/10.1364/oe.380383
TNO identifier
873518
Publisher
Optical Society of America OSA
ISSN
1094-4087
Source
Optics Express, 28 (2), 1539-1553
Document type
article