Title
Deposition of zinc oxide using an atmospheric low temperature plasma process
Author
Winands, G.J.J.
Theelen, M.J.
Kouijzer, S.
van Deelen, J.
de Graaf, A.
Poodt, P.W.G.
Netherlands Organization for Applied Scientific Research (TNO), PO Box 6235, 5600 HE Eindhoven, Netherlands
Publication year
2010
Subject
Mechatronics, Mechanics & Materials
TFT - Thin Film Technology
TS - Technical Sciences
Materials
Industrial Innovation
atmospheric pressure plasma
CVD
zinc oxide
plasma annealing
zinc acetyleacetonate
To reference this document use:
http://resolver.tudelft.nl/uuid:be6b2559-e767-47bb-923e-ca14e9b8ae92
TNO identifier
464457
Source
6th International Conference on Coatings on Glass and Plastics - Advanced Coatings for Large-Area or High-Volume Products, ICCG6, Prague, Czech Republic, September 3-5, 2010
Document type
conference paper