Title
High-resolution direct-write patterning using focused ion beams
Author
Ocola, L.E.
Rue, C.
Maas, D.J.
Publication year
2014
Abstract
Over the last few years, significant improvements in sources, columns, detectors, control software, and accessories have enabled a wealth of new focused ion beam applications. In addition, modeling has provided many insights into ion-sample interactions and the resultant effects on the sample. With the knowledge gained, the community has found new ion-beam induced chemistries and ion-beam sources, allowing extending nanostructure fabrication and material deposition to smaller dimensions and better control for direct write and patterning. Insignificant proximity effects in resist-based ion beam lithography, combined with the availability of sub-nm ion spot sizes, opens the way to sub-10 nm structures and dense patterns. Additionally, direct-write ion beam nanomachining can process multilevel structures with arbitrary depths in one single process step, with all the information included in a single standard design file, thus enabling fabrication applications not achievable with any other technique. © 2014 Materials Research Society.
Subject
Physics & Electronics
NI - Nano Instrumentation
TS - Technical Sciences
High Tech Systems & Materials
Nanotechnology
Industrial Innovation
Ion-beam assisted deposition
Ion-beam processing
Ion-implantation
Ion-solid interactions
Lithography (removal)
Microstructures
Application programs
Focused ion beams
Gallium
Helium
Ion beam assisted deposition
Ions
Microstructures
Neon
Silicon
Direct-write patterning
Ion-beam applications
Material deposition
Multi-level structures
Nanostructure fabrication
Proximity effects
Nanostructures
FIB
To reference this document use:
http://resolver.tudelft.nl/uuid:be286be1-9b58-4061-a804-972ad053b5d2
TNO identifier
500738
Publisher
Materials Research Society
ISSN
0883-7694
Source
MRS Bulletin, 39 (4), 342-346
Bibliographical note
Dit record bevat ook een link naar de Editorial van het special issue waarin het hoofdartikel is gepubliceerd
Document type
article