Print Email Facebook Twitter High-resolution direct-write patterning using focused ion beams Title High-resolution direct-write patterning using focused ion beams Author Ocola, L.E. Rue, C. Maas, D.J. Publication year 2014 Abstract Over the last few years, significant improvements in sources, columns, detectors, control software, and accessories have enabled a wealth of new focused ion beam applications. In addition, modeling has provided many insights into ion-sample interactions and the resultant effects on the sample. With the knowledge gained, the community has found new ion-beam induced chemistries and ion-beam sources, allowing extending nanostructure fabrication and material deposition to smaller dimensions and better control for direct write and patterning. Insignificant proximity effects in resist-based ion beam lithography, combined with the availability of sub-nm ion spot sizes, opens the way to sub-10 nm structures and dense patterns. Additionally, direct-write ion beam nanomachining can process multilevel structures with arbitrary depths in one single process step, with all the information included in a single standard design file, thus enabling fabrication applications not achievable with any other technique. © 2014 Materials Research Society. Subject Physics & ElectronicsNI - Nano InstrumentationTS - Technical SciencesHigh Tech Systems & MaterialsNanotechnologyIndustrial InnovationIon-beam assisted depositionIon-beam processingIon-implantationIon-solid interactionsLithography (removal)MicrostructuresApplication programsFocused ion beamsGalliumHeliumIon beam assisted depositionIonsMicrostructuresNeonSiliconDirect-write patterningIon-beam applicationsMaterial depositionMulti-level structuresNanostructure fabricationProximity effectsNanostructuresFIB To reference this document use: http://resolver.tudelft.nl/uuid:be286be1-9b58-4061-a804-972ad053b5d2 TNO identifier 500738 Publisher Materials Research Society ISSN 0883-7694 Source MRS Bulletin, 39 (4), 342-346 Bibliographical note Dit record bevat ook een link naar de Editorial van het special issue waarin het hoofdartikel is gepubliceerd Document type article Files To receive the publication files, please send an e-mail request to TNO Library.