Title
Natively textured ZnO grown by PECVD as front electrode material for amorphous silicon pin solar cells
Author
Löffler, J.
Schropp, R.E.I.
Groenen, Ft.
Van De Sanden, M.C.M.
Linden, J.L.
Technisch Physische Dienst TNO - TH
Publication year
2000
Abstract
Natively textured ZnO layers for the application as front electrode material in amorphous silicon pin solar cells have been deposited by Expanding Thermal Plasma Chemical Vapor Deposition. Films deposited in the temperature regime from 150 to 350°C at a rate between 0.65 and 0.75 nm/s have been characterteed with respect to their optical, electrical and structural properties. Results comparable to Asahi U-type SnO2:F have been obtained for these layers. First solar cells on ZnO, which was deposited at 250°C and 350°C, show an efficiency approaching 10%, only slightly lower than on Asahi U-type SnO2:F. cop. 2000 IEEE.
Subject
Electronics
Chemical vapor deposition
Electrodes
Plasma CVD
Solar cells
Zinc oxide
ZnO
Amorphous silicon
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DOI
https://doi.org/10.1109/pvsc.2000.916027
TNO identifier
530868
Publisher
Institute of Electrical and Electronics Engineers Inc.
ISBN
0780357728
ISSN
0160-8371
Source
28th IEEE Photovoltaic Specialists Conference, PVSC 2000, 15 September 2000 through 22 September 2000, 892-895
Article number
916027
Document type
conference paper