Title
Flexible AMOLED display on polyethylene napthalate (PEN) foil with metal-oxide TFT backplane
Author
Tripathi, A.K.
van der Putten, B.
van der Steen, J.L.
Tempelaars, K.
Cobb, B.
Ameys, M.
Ke, T.H.
Myny, K.
Steudel, S.
Nag, M.
Schols, S.
Vicca, P.
Smout, S.
Genoe, J.
Heremans, P.
Yakimets, I.
Gelinck, G.H.
Publication year
2012
Abstract
We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that yields a final mobility of the IGZO TFTs of ∼ 13 cm2A/s.
Subject
Mechatronics, Mechanics & Materials
HOL - Holst
TS - Technical Sciences
High Tech Systems & Materials
Electronics Industry
Industrial Innovation
AMOLED
Displays
Flexible
Low-temperature
Metal-oxide semiconductors
AM-OLED
Flexible
Indium gallium zinc oxides (IGZO)
Low temperatures
Metal oxide semiconductor
Photolithography process
Polyethylene napthalate
Processing temperature
Display devices
Flexible displays
Light emitting diodes
Photolithography
Temperature
Thin film transistors
To reference this document use:
http://resolver.tudelft.nl/uuid:b949ccec-e9b8-4486-bbe9-abcc99dc4c97
TNO identifier
482990
ISBN
9781627486521
ISSN
1883-2490
Source
19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, 4 December 2012 through 7 December 2012, Kyoto, 3, 1782-1785
Series
Proceedings of the International Display Workshops
Document type
conference paper