Print Email Facebook Twitter Electrostatically actuated probes for Scanning Subsurface Ultrasonic Resonance Frequency Microscopy Title Electrostatically actuated probes for Scanning Subsurface Ultrasonic Resonance Frequency Microscopy Author van Es, M.H. van Riel, M.C.J.M. Duivenvoorde, T. Sadeghian Marnani, H. Publication year 2019 Abstract Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on high frequency ultrasound in combination with Atomic Force Microscopy to detect viscoelastic properties of buried materials with high spatial resolution. The key ingredient is a very high frequency ultrasound wave which is amplitude modulated at the sensing cantilevers resonance frequency. Subject Electrostatically actuated probesMicroscopyScanning Subsurface Ultrasonic Frequency Microsopy (SSUFM)ERP Early Research ProgramERP 3D Nanomanufacturing InstrumentsHigh Tech Systems & MaterialsIndustrial Innovation To reference this document use: http://resolver.tudelft.nl/uuid:b5b08a3c-e8a7-4206-8a6e-bb808df000dc TNO identifier 867690 Publisher TNO, Delft Source SID Semicon Innovation Day, Science Centre Delft, 21 May 2019 Bibliographical note Presented poster Document type other Files PDF vanes-2019-electrostatically.pdf