Title
Nano-tuning of pores in ceramic membranes
Author
Jain, H.
Peper, J.
Nijboer, M.P.
Chen, M.
Aarnink, T.
Kovalgin, A.Y.
Roozeboom, F.
Nijmeijer, A.
Luiten-Olieman, M.W.J.
Publication year
2022
Subject
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:b4c35ea9-9397-45a3-b897-33a9937ef8fd
TNO identifier
972433
Publisher
TNO
Bibliographical note
AVS 22nd Int. Conf. on Atomic Layer Deposition & 9th Int. Atomic Layer Etching Workshop (ALD-ALE 2022), Ghent, Belgium, June 26-29, 2022, Abstract 72680 (AA-TuP-33)
Document type
conference paper