Print Email Facebook Twitter Nano-tuning of pores in ceramic membranes Title Nano-tuning of pores in ceramic membranes Author Jain, H. Peper, J. Nijboer, M.P. Chen, M. Aarnink, T. Kovalgin, A.Y. Roozeboom, F. Nijmeijer, A. Luiten-Olieman, M.W.J. Publication year 2022 Subject Industrial Innovation To reference this document use: http://resolver.tudelft.nl/uuid:b4c35ea9-9397-45a3-b897-33a9937ef8fd TNO identifier 972433 Publisher TNO Bibliographical note AVS 22nd Int. Conf. on Atomic Layer Deposition & 9th Int. Atomic Layer Etching Workshop (ALD-ALE 2022), Ghent, Belgium, June 26-29, 2022, Abstract 72680 (AA-TuP-33) Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.