Print Email Facebook Twitter Design of an aberration corrected low-voltage SEM Title Design of an aberration corrected low-voltage SEM Author van Aken, R.H. Maas, D.J. Hagen, C.W. Barth, J.E. Kruit, P. TNO Industrie en Techniek Publication year 2010 Abstract The low-voltage foil corrector is a novel type of foil aberration corrector that can correct for both the spherical and chromatic aberration simultaneously. In order to give a realistic example of the capabilities of this corrector, a design for a low-voltage scanning electron microscope with the low-voltage foil corrector is presented. A fully electrostatic column has been designed and characterised by using aberration integrals and ray tracing calculations. The amount of aberration correction can be adjusted relatively easy. The third order spherical and the first order chromatic aberration can be completely cancelled. In the zero current limit, a FW50 probe size of 1.0. nm at 1. kV can be obtained. This probe size is mainly limited by diffraction and by the fifth order spherical aberration. © 2010 Elsevier B.V. Subject ElectronicsAberration correctionChromatic aberrationFoilLow energyLow voltageSEMSpherical aberrationAberration correctionChromatic aberrationFoilLow energiesLow voltagesSEMSpherical aberrationsProbesScanning electron microscopySpheresAberrationsarticlecomputer analysiselectron beamequipment designfoillow voltage scanning electron microscopescanning electron microscopestatic electricity To reference this document use: http://resolver.tudelft.nl/uuid:aed4179c-5c8d-4af2-b6f9-9909687ed8a2 DOI https://doi.org/10.1016/j.ultramic.2010.07.012 TNO identifier 409224 ISSN 0304-3991 Source Ultramicroscopy, 110 (11), 1411-1419 Document type article Files To receive the publication files, please send an e-mail request to TNO Library.