Print Email Facebook Twitter Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester Title Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester Author Altena, G. Hohlfeld, D. Elfrink, R. Goedbloed, M.H. van Schaijk, R. Publication year 2011 Abstract This paper reports on the design, modelling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester with an elegant and robust process flow. The fabrication is based on a SOI wafer with self-aligned electrodes of the variable capacitor. The output current of the device shows distinct steps that are caused by strong lateral electrostatic forces. An electro-mechanical model was used to analyze and confirm the observed behaviour. © 2011 IEEE. Subject Mechatronics, Mechanics & MaterialsHOL - HolstTS - Technical SciencesIndustrial InnovationElectretElectrostaticEnergy harvesterMEMSSABERScavengingVariable capacitorVibration generationElectromechanical modelsElectrostatic energiesEnergy harvesterOutput currentProcess flowsSABERSelf-aligned electrodesSOI wafersVariable capacitorVibration generationActuatorsCapacitorsElectretsElectrostatic actuatorsElectrostatic forceFabricationHarvestersMicrosystemsSolid-state sensorsEnergy harvesting To reference this document use: http://resolver.tudelft.nl/uuid:ac3c58d7-27a8-4181-ac46-ca280386ea44 DOI https://doi.org/10.1109/transducers.2011.5969847 TNO identifier 461421 ISBN 9781457701573 Source 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 5 June 2011 through 9 June 2011, Beijing, 739-742 Article number No.: 5969847 Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.