Title
Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester
Author
Altena, G.
Hohlfeld, D.
Elfrink, R.
Goedbloed, M.H.
van Schaijk, R.
Publication year
2011
Abstract
This paper reports on the design, modelling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester with an elegant and robust process flow. The fabrication is based on a SOI wafer with self-aligned electrodes of the variable capacitor. The output current of the device shows distinct steps that are caused by strong lateral electrostatic forces. An electro-mechanical model was used to analyze and confirm the observed behaviour. © 2011 IEEE.
Subject
Mechatronics, Mechanics & Materials
HOL - Holst
TS - Technical Sciences
Industrial Innovation
Electret
Electrostatic
Energy harvester
MEMS
SABER
Scavenging
Variable capacitor
Vibration generation
Electromechanical models
Electrostatic energies
Energy harvester
Output current
Process flows
SABER
Self-aligned electrodes
SOI wafers
Variable capacitor
Vibration generation
Actuators
Capacitors
Electrets
Electrostatic actuators
Electrostatic force
Fabrication
Harvesters
Microsystems
Solid-state sensors
Energy harvesting
To reference this document use:
http://resolver.tudelft.nl/uuid:ac3c58d7-27a8-4181-ac46-ca280386ea44
DOI
https://doi.org/10.1109/transducers.2011.5969847
TNO identifier
461421
ISBN
9781457701573
Source
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 5 June 2011 through 9 June 2011, Beijing, 739-742
Article number
No.: 5969847
Document type
conference paper