Title
Deep subsurface imaging with subsurface probe micro-scopy @ GHZ
Author
van Neer, P.L.M.J.
van Es, M.H.
Piras, D.
Navarro, V.
Mohtashami, A.
van der Lans, M.J.
Sadeghian Marnani, H.
Publication year
2019
Abstract
This work details the initial simulation and experimental GHz SPM work carried out at TNO.
Subject
High Tech Systems & Materials
Industrial Innovation
Deep surface imaging
Microscopy
GHz SPM
Atomic Force Microsopy (AFM)
Subsurface Probe Microscopy (SSPM)
ERP Early Research Program
ERP 3D Nanomanufacturing Instruments
To reference this document use:
http://resolver.tudelft.nl/uuid:a1fb7150-6b71-4868-bf46-c8cddcbaf297
TNO identifier
867691
Publisher
TNO, Delft
Source
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Bibliographical note
Presented poster
Document type
other