Title
Toward a minituarized low-power micromechanical electronic nose
Author
Karabaçak, D.
Sieben-Xu, L.
Vandecasteele, M.
van Andel, Y.
Wouters, D.
Calama, M.C.
Brongersma, S.H.
Publication year
2012
Abstract
An electronic nose based on an array of vibrating doubly clamped beams is proposed. These very high aspect ratio (length/thickness) suspended resonators can be individually functionalized by applying polymer coatings with an inkjet printing approach. The absorption of volatile compounds induces a swelling of the polymers that result in axial stress formation and a shift of the resonance frequency. Furthermore, integrated piezoelectric transducers are used for both actuating the resonators, as well as monitoring their resonance frequency in an oscillator loop. This allows for detection at ppm-level concentrations of low molecular weight volatiles. More importantly, the generic resonant transducers can be individually coated with different polymers to allow for selective detection of volatile compounds. Here, we present the first results demonstrating the obtained selectivity by varying the coating chemistry on identical resonators.
Subject
Mechatronics, Mechanics & Materials
HOL - Holst
TS - Technical Sciences
High Tech Systems & Materials
Electronics
Industrial Innovation
Electronic nose
Microelectromechanical systems (MEMS)
Volatile detection
To reference this document use:
http://resolver.tudelft.nl/uuid:9761a2c2-b0c6-470b-a1e8-c780038abf52
TNO identifier
466699
Publisher
IEEE
Source
IEEE Sensors Journal, 12 (11), 3184-3188
Document type
article