Title
On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity
Author
Galeotti, F.
Sersic-Vollenbroek, I.
Petruzzella, M.
Pagliano, F.M.
van Otten, F.W.M.
Zobenica, Z.
Sadeghian Marnani, H.
Mohtashami, A.
van der Heijden, R.W.
Fiore, A.
Publication year
2019
Abstract
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
Subject
High Tech Systems & Materials
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:8b192057-ecdc-42c1-9428-c0005372e9d5
DOI
https://doi.org/10.1109/cleoe-eqec.2019.8871530
TNO identifier
870061
Publisher
Institute of Electrical and Electronics Engineers IEEE
ISBN
9781728104690
Source
Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019, Munich, Germany, 23-27 June 2019
Article number
8871530
Document type
conference paper