Title
Large-area spatial atmospheric ALD: Al2O3 in a Gen-1 sheet-to-sheet prototype tool
Author
Frijters, C.
van den Bruele, F.
Grob, F.
Illiberi, A.
Creyghton, Y.
Roozeboom, F.
Poodt, P.
Publication year
2017
Subject
Nano Technology
HOL - Holst
TS - Technical Sciences
Materials Physics
Industrial Innovation
Atomic layer deposition
Spatial ALD
Thin film transistors
IZO
Indium zinc oxides
To reference this document use:
http://resolver.tudelft.nl/uuid:89b026be-8328-4ab2-9d83-7c472e47b7f2
TNO identifier
776077
Source
Abstracts 17th AVS International Conference on Atomic Layer Deposition & 4th International Atomic Layer Etching Workshop (ALD - ALE 2017), Denver, USA, July 15-18, 2017
Document type
public lecture