Title
Room temperature sensing of O2 and CO by atomic layer deposition prepared ZnO films coated with Pt nanoparticles
Author
Erkens, I.J.M.
Blauw, M.A.
Verheijen, M.A.
Roozeboom, F.
Kessels, W.M.M.
Publication year
2013
Abstract
Ultralow-power gas sensing devices need to operate without an energy consuming heater element. This requires the design of sensing devices that are so efficient that they can operate at room temperature (RT). Here, we report on the RT sensing performance of atomic layer deposition (ALD) prepared i-ZnO and Al-doped ZnO sensing devices. The sensitivity of these devices has been catalytically enhanced with ALD Pt nanoparticles (NPs). It was shown that the size distribution of the Pt NPs can be controlled by the number of Pt-ALD cycles. The Pt-enhanced sensing devices showed a reversible, proportional change in current response at RT upon exposure to O2 and CO. O2 could be detected, diluted in N2, down to 0.5%. CO could be detected, diluted in N2 in the presence of O2 and H2O, down to 20 ppm. Reference devices without Pt NPs showed no response, indicating the importance of the Pt NPs for the sensing mechanism. cop. The Electrochemical Society.
Subject
Mechatronics, Mechanics & Materials
HOL - Holst
TS - Technical Sciences
Chemistry
Industrial Innovation
Deposition
Metal nanoparticles
Platinum
Zinc oxide
Gas sensing devices
Room temperature sensing
Atomic layer deposition
To reference this document use:
http://resolver.tudelft.nl/uuid:86bb4282-089b-4b64-a717-d377cf360233
DOI
https://doi.org/10.1149/05810.0203ecst
TNO identifier
513485
Publisher
Electrochemical Society Inc.
ISSN
1938-6737
Source
ECS Transactions, 58 (10), 203-214
Document type
article