Title
Efficient extraction of thin-film thermal parameters from numerical models via parametric model order reduction
Author
Bechtold, T.
Hohlfeld, D.
Rudnyi, E.B.
Günther, M.
Publication year
2010
Abstract
In this paper we present a novel highly efficient approach to determine material properties from measurement results. We apply our method to thermal properties of thin-film multilayers with three different materials, amorphous silicon, silicon nitride and silicon oxide. The individual material properties are identified by solving an optimization problem. For this purpose, we build a parameterized reduced-order model from a finite element (FE) model and fit it to the measurement results. The use of parameterized reduced-order models within the optimization iterations speeds up the transient solution time by several orders of magnitude, while retaining almost the same precision as the full-scale model. © 2010 IOP Publishing Ltd.
Subject
Mechatronics, Mechanics & Materials
HOL - Holst
TS - Technical Sciences
High Tech Systems & Materials
Electronics
Industrial Innovation
Finite element models
Full-scale models
Material property
Measurement results
Numerical models
Optimization problems
Orders of magnitude
Parameterized
Parametric models
Reduced order models
Thermal parameters
Thermal properties
Transient solutions
Amorphous films
Finite element method
Materials properties
Silicon nitride
Silicon oxides
Thermodynamic properties
Thin film devices
Amorphous silicon
To reference this document use:
http://resolver.tudelft.nl/uuid:802e504a-281f-40a9-a904-dc1560c26086
DOI
https://doi.org/10.1088/0960-1317/20/4/045030
TNO identifier
461594
ISSN
0960-1317
Source
Journal of Micromechanics and Microengineering, 20 (4)
Article number
No.: 045030
Document type
article