Print Email Facebook Twitter Flexible a-IGZO TFT Technology: New Developments Applications Title Flexible a-IGZO TFT Technology: New Developments Applications Author Kronemeijer, A.J. Katsouras, I. Poodt, P. Akkerman, H.B. van Breemen, A.J.J.M. Gelinck, G.H. Publication year 2018 Abstract We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection. © 2018 FTFMD. International Society of Functional Thin Film Materials and Devices; The Japan Society of Applied Physics Subject Field effect transistorsFlat panel displaysFlexible displaysNanoimprint lithographyPattern recognitionSemiconducting indium compoundsAM-OLEDBuilding blockesChannel lengthFingerprint detectionsManufacturing costMonolithically integratedOperating voltageTechnology scalingThin film transistors To reference this document use: http://resolver.tudelft.nl/uuid:7a624b8a-a6c3-4d5b-8c89-af55af1253e4 TNO identifier 842675 Publisher Institute of Electrical and Electronics Engineers Inc. ISBN 9784990875350 Source AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings, 3 July 2018 through 6 July 2018 Article number 8437444 Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.