Title
Flexible a-IGZO TFT Technology: New Developments Applications
Author
Kronemeijer, A.J.
Katsouras, I.
Poodt, P.
Akkerman, H.B.
van Breemen, A.J.J.M.
Gelinck, G.H.
Publication year
2018
Abstract
We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection. © 2018 FTFMD. International Society of Functional Thin Film Materials and Devices; The Japan Society of Applied Physics
Subject
Field effect transistors
Flat panel displays
Flexible displays
Nanoimprint lithography
Pattern recognition
Semiconducting indium compounds
AM-OLED
Building blockes
Channel length
Fingerprint detections
Manufacturing cost
Monolithically integrated
Operating voltage
Technology scaling
Thin film transistors
To reference this document use:
http://resolver.tudelft.nl/uuid:7a624b8a-a6c3-4d5b-8c89-af55af1253e4
TNO identifier
842675
Publisher
Institute of Electrical and Electronics Engineers Inc.
ISBN
9784990875350
Source
AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings, 3 July 2018 through 6 July 2018
Article number
8437444
Document type
conference paper