Print Email Facebook Twitter Toward large-area roll-to-roll printed nanophotonic sensors Title Toward large-area roll-to-roll printed nanophotonic sensors Author Karioja, P. Hiltunen, J. Aikio, S.M. Alajoki, T. Tuominen, J. Hiltunen, M. Siitonen, S. Kontturi, V. Böhlen, K. Hauser, R. Charlton, M. Boersma, A. Lieberzeit, P. Felder, T. Eustace, D. Haskal, E. Publication year 2014 Abstract Polymers have become an important material group in fabricating discrete photonic components and integrated optical devices. This is due to their good properties: high optical transmittance, versatile processability at relative low temperatures and potential for low-cost production. Recently, nanoimprinting or nanoimprint lithography (NIL) has obtained a plenty of research interest. In NIL, a mould is pressed against a substrate coated with a moldable material. After deformation of the material, the mold is separated and a replica of the mold is formed. Compared with conventional lithographic methods, imprinting is simple to carry out, requires less-complicated equipment and can provide high-resolution with high throughput. Nanoimprint lithography has shown potential to become a method for low-cost and high-throughput fabrication of nanostructures. We show the development process of nano-structured, large-area multi-parameter sensors using Photonic Crystal (PC) and Surface Enhanced Raman Scattering (SERS) methodologies for environmental and pharmaceutical applications. We address these challenges by developing roll-to-roll (R2R) UV-nanoimprint fabrication methods. Our development steps are the following: Firstly, the proof of concept structures are fabricated by the use of wafer-level processes in Si-based materials. Secondly, the master molds of successful designs are fabricated, and they are used to transfer the nanophotonic structures into polymer materials using sheet-level UV-nanoimprinting. Thirdly, the sheet-level nanoimprinting processes are transferred to roll-to-roll fabrication. In order to enhance roll-to-roll manufacturing capabilities, silicone-based polymer material development was carried out. In the different development phases, Photonic Crystal and SERS sensor structures with increasing complexities were fabricated using polymer materials in order to enhance sheet-level and roll-to-roll manufacturing processes. In addition, chemical and molecular imprint (MIP) functionalization methods were applied in the sensor demonstrators. In this paper, the process flow in fabricating large-area nanophotonic structures by the use of sheet-level and roll-to-roll UV- nanoimprinting is reported. cop. 2014 SPIE. Organisation: Brussels Photonics Team (B-PHOT); Brussels-Capital Region; Fonds Wetenschappelijk Onderzoek (FWO); The Society of Photo-Optical Instrumentation Engineers (SPIE); Ville de Bruxelles Subject Mechanics, Materials and StructuresMIP - Materials for Integrated ProductsTS - Technical SciencesIndustrial InnovationNILPhotonic crystalPolymer waveguidesRoll to roll printingSERSUV nanoimprintingChemical sensorsFabricationMoldsNanophotonicsNanostructuresPolymersSilicon wafersSiliconesSubstratesSurface scatteringNanoimprint lithography To reference this document use: http://resolver.tudelft.nl/uuid:72e815f6-3509-426e-915e-9db1fe51cf94 DOI https://doi.org/10.1117/12.2052496 TNO identifier 513428 Publisher SPIE ISBN 9781628410891 ISSN 1996-756X Source Optical Sensing and Detection III, 14 April 2014 through 17 April 2014, Brussels, 9141 Series Proceedings of SPIE - The International Society for Optical Engineering Article number 91410D Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.