Title
In-line height profiling metrology sensor for zero defect production control
Author
Snel, R.
Winters, J.
Liebig, T.
Jonker, W.A.
Contributor
Lehmann, P. (editor)
Goncalves, A.A. (editor)
Osten, W. (editor)
Publication year
2017
Abstract
Contemporary production systems of mechanical precision parts show challenges as increased complexity, tolerances shrinking to sub-microns and yield losses that must be mastered to the extreme. More advanced automation and process control is required to accomplish this task. Often a solution based on feedforward/feedback control is chosen requiring innovative and more advanced in line metrology. This article concentrates first on the context of in line metrology for process control and then on the development of a specific in line height profiling sensor. The novel sensor technology is based on full field time domain white light interferometry which is well know from the quality lab. The novel metrology system is to be mounted close to the production equipment, as required to minimize time delay in the control loop, and is thereby fully exposed to vibrations. This sensor is innovated to perform in line with an orders of magnitude faster throughput than laboratory instruments; it's robust to withstand the rigors of workshops and has a height resolution that is in the nanometer range.
Subject
Delay control systems
Optical data processing
Optical testing
Optical variables measurement
Production control
Sensors
Time delay
Units of measurement
Advanced manufacturing
Height profiling
In-line metrology
Industry 4.0
Zero defects
Process control
High Tech Systems & Materials
Industrial Innovation
Nano Technology
OM - Opto-Mechatronics
TS - Technical Sciences
To reference this document use:
http://resolver.tudelft.nl/uuid:6cf955d2-cf46-4889-9063-55cbe4f81d0c
TNO identifier
781341
Publisher
SPIE
ISBN
9781510611030
ISSN
0277-786X
Source
Optical Measurement Systems for Industrial Inspection X, Munich, Germany, 26-29 June 2017, 10329 (10329)
Document type
conference paper