Title
Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer
Author
Galeotti, F.
Lindgren, G.
Petruzzella, M.
van Otten, F.W.M.
Sadeghian Marnani, H.
Mohtashami, A.
van der Heijden, R.
Fiore, A.
Publication year
2021
Abstract
The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.
Subject
AFM
Integrated displacement sensor
Opto-electro-mechanics
Photonic crystal
High Tech Systems & Materials
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:6c69fcfd-7545-41f6-b841-3c36a83c9c5b
DOI
https://doi.org/10.1016/j.ultramic.2021.113368
TNO identifier
959012
Publisher
Elsevier, Amsterdam
ISSN
0304-3991
Source
Ultramicroscopy, 230 (230)
Document type
article