Print Email Facebook Twitter Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer Title Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer Author Galeotti, F. Lindgren, G. Petruzzella, M. van Otten, F.W.M. Sadeghian Marnani, H. Mohtashami, A. van der Heijden, R. Fiore, A. Publication year 2021 Abstract The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems. Subject AFMIntegrated displacement sensorOpto-electro-mechanicsPhotonic crystalHigh Tech Systems & MaterialsIndustrial Innovation To reference this document use: http://resolver.tudelft.nl/uuid:6c69fcfd-7545-41f6-b841-3c36a83c9c5b DOI https://doi.org/10.1016/j.ultramic.2021.113368 TNO identifier 959012 Publisher Elsevier, Amsterdam ISSN 0304-3991 Source Ultramicroscopy, 230 (230) Document type article Files To receive the publication files, please send an e-mail request to TNO Library.