Title
Overview of doctoral theses on Atomic Layer Deposition collected in the Virtual Project on the History of ALD
Author
Aarik, J.
Roozeboom, F.
Publication year
2019
Abstract
The virtual project on the history of ALP (VPHA) is a worldwide collaborative Open Science initiative started in summer 2013, set up to clarify the early days of Atomic Layer Deposition (ALD), especially related to its two independent discoveries. in this VPHA, early ALD publications are overviewed up to 1986 in an atmosphere of Openness, Respect and Trust. Also, four scientific journal articles have resulted.
Subject
Industrial Innovation
Theses
Atomic layer deposition
ALD
To reference this document use:
http://resolver.tudelft.nl/uuid:6bd32859-7526-44b5-985a-8cc6b89a9b1b
TNO identifier
866747
Source
EuroCVD 22-Baltic ALD 16, Luxembourg, June 24-28, 2019
Document type
public lecture