Title
Quantitative surface characterization using a Nomarski microscope
Author
van Brug, H.
Booij, S.M.
Fähnle, O.W.
van der Bijl, R.J.M.
Technisch Physische Dienst TNO - TH
Contributor
Tatsuno, K. (editor)
Publication year
2000
Abstract
The use of a Nomarski microscope for the characterization of surface features will be presented. Since a Nomarski microscope measures slope values, the shape of a surface can be followed quantitatively. Besides, a Nomarski microscope can be used to analyze surface roughness in terms of rms value and a distinction between different types of surface roughness is possible. Examples of Nomarski measurements will be shown and discussed.
Subject
Electronics
Interference microscopy
Surface measurements
Roughness
Optical inspection
To reference this document use:
http://resolver.tudelft.nl/uuid:6abf671d-388b-4027-8024-2c0a9a51c0c6
TNO identifier
525194
Publisher
TNO
Source
Optical Fabrication and Testing, 18-22 June 2000, Québec, Canada
Document type
conference paper