Title
Nanopositioning MEMS stage for high speed positioning of metamaterials lenses for use in high resolution optical imaging
Author
Herfst, R.W.
Bijster, R.J.F.
Dekker, A.
Wei, J.
van Zeijl, H.W.
Kruidhof, R.
Sadeghian Marnani, H.
Publication year
2017
Abstract
High resolution and high throughput imaging are typically mutually exclusive. While there is a wide range of techniques to image features beyond the diffraction limit of light, they all have their own benefits and drawbacks, but they are often very slow compared to optical systems. As such, extending the performance of optical microscopes remains. Examples of high resolution optical concepts are metamaterials nano-antennas, superoscillatory lenses and hyperlenses. These concepts require precise and high speed positioning of the optical element at lens-to-sample separations measured in tens of nanometers. We present a design and process for a MEMS nanopositioning stage capable of sub-nm positioning of a metamaterials optical lens with very high bandwidth. Laser vibrometer measurements on the first batch of fully fabricated devices showed that the first eigenfrequency is at 500±25 kHz, somewhat below the 660 kHz obtained by FEM simulations. Due to squeeze film damping, the quality factor is relatively low (approximately 2-2.5), which is advantageous for reaching high positioning bandwidth when the device is used in a near-field optical imaging microscope.
Subject
Nano Technology
OM - Opto-Mechatronics
TS - Technical Sciences
High Tech Systems & Materials
Electronics
Industrial Innovation
Bandwidth
Diffraction
Imaging techniques
Intelligent mechatronics
Metamaterial antennas
Nanoantennas
Optical image storage
Optical resolving power
Diffraction limit of light
High resolution optical imaging
High-speed positioning
High-throughput imaging
Nano-positioning stages
Near-field optical imaging
Optical microscopes
Squeeze-film damping
Lenses
To reference this document use:
http://resolver.tudelft.nl/uuid:68d7d841-3a73-4e90-aed8-603376cff921
TNO identifier
781411
Publisher
Institute of Electrical and Electronics Engineers IEEE
ISBN
9781509059980
Source
2017 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, 3-7 July 2017, 1310-1315
Article number
8014199
Document type
conference paper