Title
Paper S12 5 : Self-aligned a-IGZO TFTs : Impact of S/D contacts formation on their Negative-Bias-Illumination-Stress (NBIS) instability
Author
Nag, M.
Steudel, S.
Smout, S.
Bhoolokam, A.
Genoe, J.
Cobb, B.
Kumar, A.
Groeseneken, G.
Heremans, P.
Publication year
2015
Abstract
In this work, we present the impact of S/D contact formation, that is, by SiN plasma doping (hydrogen incorporation), metallic reduction (by calcium) and by argon plasma (compositional change) on NBIS instabilities of self-aligned a-IGZO TFTs.
Subject
Nano Technology
HOL - Holst
TS - Technical Sciences
Chemistry
To reference this document use:
http://resolver.tudelft.nl/uuid:61ea7625-9941-4860-b112-8e85226b1ad1
DOI
https://doi.org/10.1002/sdtp.10532
TNO identifier
533739
Publisher
Wiley
Source
SID Symposium Digest of Technical Papers, 46 (S1), 55
Document type
article