Print Email Facebook Twitter High-throughput scanning probe instruments for nanopatterning, alignment, and overlay metrology Title High-throughput scanning probe instruments for nanopatterning, alignment, and overlay metrology Author Navarro, V. Mohtashami, A. Herfst, R.W. Maturova, K. van Es, M.H. Piras, D. Sadeghian Marnani, H. Contributor Sanchez, M.I. (editor) Panning, E.M. (editor) Publication year 2018 Abstract As the pitch approaches the 10nm node, in order to meet current and future patterning challenges, high resolution techniques are required, complementary to extreme ultraviolet lithography (EUVL) for high volume manufacturing of nanodevices. These complementary techniques should have the following specifications: 1) High patterning resolution, below 10 nm; 2) capability of patterning in 3D; 3) sufficient wafer-scale throughput; 4) the capability of closed loop metrology and 5) the capability of measuring nondestructively through layers, for alignment and overlay applications. Scanning probe microscopy (SPM) has shown a great degree of nano-scale control, and a great potential to address the challenges found in metrology. There has been a broad development of SPM-based methods for patterning and metrology purposes although its exploitation for technological applications is limited due to the modest throughput of scanning probe based techniques. In this article we present experimental results that include the proof-of-principle of using SSURFM to locate existing buried nanopatterns (lines of 50 nm) and subsequently using our patterning technology to manufacture nanocontact holes aligned to the existing buried lines. In combination with the high throughput parallel scanning probe, this example demonstrates the great potential and the suitability of the group of technologies developed at TNO (consisting of the patterning and the subsurface nanoimaging) for alignment and overlay, especially through opaque layers. Subject High Tech Systems & MaterialsElectronicsIndustrial InnovationAlignment and overlayPatterningScanning probe lithographyExtreme ultraviolet lithographyManufactureNanotechnologyScanning probe microscopyContact holesHigh throughputSub-surface imaging To reference this document use: http://resolver.tudelft.nl/uuid:5f35fec0-b3e1-417d-94c8-27a8677f3164 TNO identifier 842137 Publisher SPIE ISBN 9781510616608 ISSN 0277-786X Source Novel Patterning Technologies, San Jose, CA, USA, 26 February - 1 March 2018, 10584 Series Proceedings of SPIE - The International Society for Optical Engineering Article number 1058404 Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.